ROFIN Systems for the Semiconductor Industry

ROFIN offers the most comprehensive product line worldwide for the semiconductor industry. The portfolio ranges from laser sources to turnkey solutions for micro and marking applications such as IC and wafer marking, lead-frame marking, cutting and IC decapping.

 

At ROFIN you will find comprehensive knowledge of all aspects related to the various laser applications in semiconductor manufacturing. Working closely with our customers and partners, we have established considerable expertise in customer-specific solutions

 

Click here for more information on ROFIN’s Semiconductor products.

Waferlase® line of Wafer Marking Systems 

Waferlase systems are designed to meet the most stringent requirements of silicon wafer marking, assuring traceability of the manufacturing process for fault analysis of semiconductor devices. The systems all produce marks that are machine-readable, have no negative influence on subsequent manufacturing steps, and still permit clear identification at the end of the process chain.

Waferlase ID 300

Small footprint, open-cassette wafer ID system produces debris-free marks on wafers up to 300mm in size.

Waferlase Ultra

Debris-free marking on polished silicon wafers for the device manufacturer

Waferlase Performance

Deep marking (hard mark) of silicon wafers prior to final polish